Custom Vacuum Chambers Manufacturing for Semiconductor

Custom Vacuum Chambers Manufacturing for Semiconductor

Vacuum chambers

Vacuum chambers are containers for vacuuming the interior and are the central components of sputtering, vacuum deposition equipment　for Semiconductors, Liquid crystals, Organic EL.. and Medical and Pharmaceutical Sterilizers.

Our vacuum chambers

Kyoyu Seisakusho is good at in small and medium-sized square chambers that can be effectively installed even in a small space, mainly stainless steel, welding structure, non-mass production, and full custom-made, and has many supply records in vacuum chambers.

In companies that own large machines, the production of small and medium-sized chambers in small lots with a welding structure tends to be costly because the setup man-hours is spent extra. but our company uses the manufacturing know-how accumulated to thoroughly suppress costs and we have responded to customer requirements.

In addition to machining and welding, we are also working to enhance our services by cooperating with business partners to handle a wide range of procurement of materials and vacuum parts and surface treatment.

Production range

Work materialStainless steel (SUS304, SUS316), SS400
Joining methodsTig welding, Semi-automatic welding 
Maximum size that can be manufacturedAround 1000mm square
StructureWelded structure by Tig welding
SpecificationsWe will flexibly respond to the various specifications according to heating temperature and vacuum degree such as following conditions.
- A chamber used in a low temperature range of about 150 ° C or less and that is sealed by the O-ring of the JIS flange
- A chamber used in a medium temperature range of about 300 °C or less and that is sealed by a metal gasket of the ICF flange.
- Without using a flange, it is also possible to process the O-ring groove directly on the chamber wall.
RemarksIn order to increase the degree of vacuum, we will respond to the necessary surface treatment and heat treatment. 
"Buffing , Electrolytic polishing" to improve the surface accuracy of the inner wall surface of the chamber 
"Baking treatment" to prevent the generation of residual gas in advance by gasifying gas molecules adhering to the inner wall of the chamber by cleaning or surface treatment by heat treatment.

Product examples

ICF Chamber

ICF Chamber (University Lab)

This Prototype chamber has been requested through homepage and useful in the experiment of the well-known private university. Materials SUS304 Size W500mm x L500mm x H130mm Industry/Field University Lab Processing facilities Machining, Tig welding First, please feel free to contact us. We can handle a wide range of services from technical consultation on product production ...

ICF Chamber

This product is a prototype for experimental machines using ICF flanges. Materials SUS304 Size W250mm x L300mm x H200mm Industry/Field Semiconductor Manufacturing Processing facilities Machining, Tig welding

Vacuum Chamber

This Prototype chamber has been requested through homepage and useful in annealing process. Materials SUS304 Size W500mm x L500mm x H130mm Industry/Field Machining center,Tig welding Processing facilities Machining center, Horizontal Boring Machine, Tig welder, General-purpose Lathe with NC

Vacuum Chamber

This case is a prototype development product that has been requested through the homepage. By adding a large lathe with NC to the machining process, it is possible to correspond to the cylindrical shape Materials SUS304 Size Outer diameter:φ625 mm、Height: 500mm Industry/Field Semiconductor, Flat Panel Display manufacturing equipment Processing facilities Machining center, Horizontal Boring Machine, ...

Vacuum Chamber

The inner surface of the chamber requires a smooth finish surface, so after rubbing to minimize the step, the final buff finish is done. Material SUS304 , SUS316 Size W530mm X L420mm X H550mm Industry Medical field Processing details Machining Center, Tig Welding First, please feel free to contact us. We can handle a wide ...

Chamber for Vacuum equipment

Welding a bag-shaped water cooling pipe to the outer surface of the chamber, as well as joining the plates to each other. Material SUS304 , SUS316 Size W1000〜1200mm X L1000〜1200mm X H600mm Industry Vacuum Industry Processing details Machining Center, Tig Welding

First, please feel free to contact us.

We can handle a wide range of services from technical consultation on product production and processing to consultation on specific estimates.

Contact us